Cite
HARVARD Citation
Inoue, F. et al. (6019). Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding. ECS journal of solid state science and technology. pp. P346-P350. [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Inoue, F. et al. (6019). Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding. ECS journal of solid state science and technology. pp. P346-P350. [Online].