Fabrication of Hourglass-Shaped Solid-State Nanopores. (1st January 2016)

• Record Type: Journal Article
• Authors: Li, Xiao-Ning; Li, Yu-Xing; Yang, Yi; Wang, Gang; Liu, Hou-Fang; Mohammad, Mohammad Ali; Qiu, Hao-Chuan; Ren, Tian-Ling
• Is Part Of: ECS journal of solid state science and technology. Volume 5:Number 5(2016)
• Page Start: P228
• Page End: P232
• Publication Date: 2016-01-01
• Subjects: hourglass-like inner morphology -- solid-state nanopore -- step coverage feature; Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2.0101605jss
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : Solid-state nanopore devices hold great promise for the rapid characterization of biomolecules. Here we present a simple technique that can efficiently and flexibly fabricate a large number of solid-state nanopore arrays and nanotrenches with hourglass-like inner morphology at low cost based on the step coverage feature of PECVD (plasma enhanced chemical vapor deposition). Nanopores with dimensions of 19 nm × 45 nm and nanotrenches as small as 7 nm were successfully fabricated. These results show that this technique has the potential to fabricate uniform nanopore arrays with hourglass-like inner morphology in mass production, which can be applied to the parallel analysis of biomolecules.