The Degradation Behavior of Brightener on Dimensionally Stable Anodes during the Copper Electrodeposition. Issue 13 (1st January 2019)

• Record Type: Journal Article
• Authors: Lin, Chun-Cheng; Yen, Chih-Han; Hu, Chi-Chang
• Is Part Of: Journal of the Electrochemical Society. Volume 166:Issue 13(2019)
• Page Start: D626
• Page End: D634
• Publication Date: 2019-01-01
• Subjects: Electrodeposition - Copper -- Brightener -- Copper electrodeposition -- Dimensionally stable anode; Electrochemistry -- Periodicals; 541.3705
• DOI: 10.1149/2.0781913jes
• Languages: English
• ISSNs: 0013-4651

Abstract

Abstract : This study shows the first work that in the copper electroplating bath containing brighteners, the degradation and lifetime of brighteners are mainly determined by the mixed metal oxide (MMO) coating on the anode. We demonstrate that the depolarizing ability and lifetime of bis-3-sulfopropyl-disulfide (SPS), a typical brightener in the copper electroplating bath, are strongly affected by the oxidative activity of the anode. Here, the commercially available IrO2 -based and Ta2 O5 -based dimensionally stable anodes (DSA) are employed in the Cu plating, and the oxidation rate of SPS during the deposition is analyzed. The results reveal the prolonged depolarizing ability and lifetime of SPS in the plating bath when the relatively inert anode, Ta2 O5 -DSA, is used. The degradation rate of brighteners can be quantified by the voltammetric stripping method and consequently, the variation in the brighteners activity during electrodeposition can be precisely tracked to ensure their functions. Moreover, the inert anode is highly recommended to prolong the function and lifetime of SPS, which is cost-effective and beneficial for circumventing the bath aging issue.