Cite
HARVARD Citation
Onaya, T. et al. (2016). Role of High-k Interlayer in ZrO2/High-k/ZrO2 Insulating Multilayer on Electrical Properties for DRAM Capacitor. ECS transactions. pp. 667-674. [Online].
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Onaya, T. et al. (2016). Role of High-k Interlayer in ZrO2/High-k/ZrO2 Insulating Multilayer on Electrical Properties for DRAM Capacitor. ECS transactions. pp. 667-674. [Online].