Characterization of Sputter-Deposited LiZr2(PO4)3 Thin Film Solid Electrolyte. Issue 10 (1st January 2015)

• Record Type: Journal Article
• Authors: Kim, Hee-Soo; Choi, Kwang S.; Kim, Eun J.; Kang, Kihun; Kim, Ju H.; Kim, Joosun; Yoon, Chong S.
• Is Part Of: Journal of the Electrochemical Society. Volume 162:Issue 10(2015)
• Page Start: A2080
• Page End: A2084
• Publication Date: 2015-01-01
• Subjects: Ionic conductivity -- LiZr2(PO4)3 thin film -- Solid electrolyte; Electrochemistry -- Periodicals; 541.3705
• DOI: 10.1149/2.0501510jes
• Languages: English
• ISSNs: 0013-4651

Abstract

Abstract : 320-nm-thick LiZr2 (PO4 )3 thin film was prepared by radio frequency sputtering and thermally annealed up to 1000°C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800°C was 1.3 × 10 −7 S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 × 10 −6 S/cm above 100°C. It was demonstrated that combined with chemical stability of LiZr2 (PO4 )3 and low electronic conductivity, the LiZr2 (PO4 )3 thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature.