Cite
HARVARD Citation
Thomidis, C. et al. (2015). Strong Diffusion Suppression of Low Energy–Implanted Phosphorous in Germanium by N2 Co-Implantation. ECS Solid State Letters. pp. P47-P50. [Online].
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Thomidis, C. et al. (2015). Strong Diffusion Suppression of Low Energy–Implanted Phosphorous in Germanium by N2 Co-Implantation. ECS Solid State Letters. pp. P47-P50. [Online].