Cite
HARVARD Citation
Li, Z. et al. (2022). Material Removal Rate Prediction for Sapphire Double-Sided CMP Based on RSM-SVM. ECS journal of solid state science and technology. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Li, Z. et al. (2022). Material Removal Rate Prediction for Sapphire Double-Sided CMP Based on RSM-SVM. ECS journal of solid state science and technology. p. . [Online].