Fabrication of Uniformly Arrayed Single- and Multi-Directional Slanted Cu Nanorods. (1st January 2015)

• Record Type: Journal Article
• Authors: Cho, Sung-Woon; Kim, Jun-Hyun; Bak, Jeong Geun; Kim, Chang-Koo
• Is Part Of: ECS Solid State Letters. Volume 4:Number 11(2015)
• Page Start: P85
• Page End: P87
• Publication Date: 2015-01-01
• Subjects: Cu nanorods -- slanted plasma etching
• DOI: 10.1149/2.0091510ssl
• Languages: English
• ISSNs: 2162-8750

Abstract

Abstract : Uniformly arrayed single- and multi-directional slanted Cu nanorods on a Si substrate were fabricated using a template of slanted channel structures. The single-directional slanted Cu nanorods were obtained using slanted channel structures oriented at an angle of 15° with respect to the surface normal. Double- and quadruple-directional slanted Cu nanorods were obtained using double- and quadruple-directional slanted channel structures, respectively. The double-directional Cu nanorods were symmetrically slanted at 30°, preserving the architecture of the slanted channel structures. The quadruple-directional slanted Cu nanorods had pyramidal structures, with slanted rods positioned at 30° from the surface normal to the right, left, front, and back.