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HARVARD Citation
Kubota, A. et al. (2015). Abrasive-Free Polishing of Single-Crystal 4H-SiC with Silica Glass Plates. ECS journal of solid state science and technology. pp. P468-P475. [Online].
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Kubota, A. et al. (2015). Abrasive-Free Polishing of Single-Crystal 4H-SiC with Silica Glass Plates. ECS journal of solid state science and technology. pp. P468-P475. [Online].