Cite
HARVARD Citation
Kindelmann, M. et al. (2022). The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas. Journal of the European Ceramic Society. 42 (2), pp. 561-566. [Online].
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Kindelmann, M. et al. (2022). The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas. Journal of the European Ceramic Society. 42 (2), pp. 561-566. [Online].