W‐Band High‐Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology. Issue 4 (1st July 2022)

• Record Type: Journal Article
• Authors: YAO, Shisen; CHENG, Yujian; BAI, Hang; FAN, Yong
• Is Part Of: Chinese journal of electronics. Volume 31:Issue 4(2022)
• Page Start: 665
• Page End: 673
• Publication Date: 2022-07-01
• Subjects: W‐band -- Micromachined waveguide -- Silicon micromachining -- Stepped radiation cavity -- High effciency -- Sidelobe level (SLL); Electronics -- Periodicals; Electronics -- China -- Periodicals; Electronics; China; Periodicals; 621.38105
• DOI: 10.1049/cje.2020.00.315
• Languages: English
• ISSNs: 1022-4653

Abstract

Abstract : A high‐efficiency waveguide slot array antenna with low sidelobe level (SLL) is investigated for W‐band applications. The silicon micromachining technology is utilized to realize multilayer antenna architecture by three key steps of selective etching, gold plating and Au‐Au bonding. The radiating slot based on this technique becomes thick with a minimum thickness of 0.2 mm and accompanies with the decrease of slot's radiation ability. To overcome this weakness, a stepped radiation cavity is loaded on the slot. The characteristic of cavity‐loaded slot is investigated to synthesize the low‐SLL array antenna. The unequal hybrid corporate feeding network is constructed to achieve sidelobe suppression in the E‐plane. A pair of 16 × 8 low‐SLL and high‐effciency slot arrays is fashioned and confirmed experimentally. The bandwidth with the radiation effciency higher than 80% is 92.3–96.3 GHz. The SLLs in both E‐ and H‐planes are below −19 dB.