Wafer-scale microfabrication of flexible organic electrochemical transistors. (1st September 2022)

• Record Type: Journal Article
• Authors: Thiburce, Quentin; Melosh, Nicholas; Salleo, Alberto
• Is Part Of: Flexible and printed electronics. Volume 7:Number 3(2022)
• Publication Date: 2022-09-01
• Subjects: flexible electronics -- organic electrochemical transistors -- photolithography -- microfabrication; Flexible electronics -- Periodicals; Printed electronics -- Periodicals; Flexible electronics; Printed electronics; Electronic journals; Periodicals; 621.381
• DOI: 10.1088/2058-8585/ac808a
• Languages: English
• ISSNs: 2058-8585

Abstract

Abstract: We describe a photolithographic process to fabricate organic microdevices on flexible substrates that relies on photolithography and dry etching and is entirely compatible with standard cleanroom wafer processing equipment. A conductive polymer is used as active material to fabricate organic electrochemical transistors on a flexible polyimide substrate. The transistors are operated both with a solid-state ion gel electrolyte and an aqueous electrolyte, thus demonstrating their applicability as building blocks as both flexible integrated circuits and biosensors. Miniaturized transistors with 2 μ m-long channels are also demonstrated to showcase the ability of the microfabrication process to define small features. We believe the proposed process flow offers a high resolution alternative to printing techniques by taking full advantage of the superior reliability of established semiconductor device manufacturing techniques and facilities.