Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator. (1st September 2022)

• Record Type: Journal Article
• Authors: Van Toan, Nguyen; Ito, Keisuke; Tuoi, Truong Thi Kim; Toda, Masaya; Chen, Po-Hung; Sabri, Mohd Faizul Mohd; Li, Jinhua; Ono, Takahito
• Is Part Of: Energy conversion and management. Volume 267(2022)
• Publication Date: 2022-09-01
• Subjects: Micro-heat sink -- Micro-thermoelectric generator -- Metal-assisted chemical etching -- Deep reactive ion etching -- Surface-to-volume ratio; Direct energy conversion -- Periodicals; Energy storage -- Periodicals; Energy transfer -- Periodicals; Énergie -- Conversion directe -- Périodiques; Direct energy conversion; Periodicals; 621.3105
• DOI: 10.1016/j.enconman.2022.115923
• Languages: English
• ISSNs: 0196-8904

Abstract

Highlights: Micro-heat sink based on silicon nanowires formed by MACE. Silicon nanowires with diameter of 100 nm and height of 9 µm. Micro-heat sink effectiveness of heat transfer rate is enhanced by 8.3 times. Improve performance of the micro-thermoelectric generator. Other potential applications: micro-supercapacitor, micro-sensor, and biological processes. Abstract: This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching (MACE) for heat dissipation enhancement to improve the performance of the micro-thermoelectric generator (µ-TEG). The heat dissipation through the micro-heat sink is enhanced by increasing the surface-to-volume ratio, which can be achieved by combining deep reactive ion etching (RIE) and MACE. Silicon nanowires with a diameter of 100 nm and a height of 9 µm are successfully formed in both horizontal and vertical surface directions. The micro-heat sink effectiveness is 8.3 times better than that of without employing the micro-heat sink. In addition, the performance of the µ-TEG has been significantly enhanced by utilizing the micro-heat sink. The maximum output power of the µ-TEG with and without the micro-heat sink are 93 µW and 18.5 µW, respectively, under the same evaluation conditions. The findings in this work may be useful not only for the µ-TEG, but also other applications such as micro-supercapacitors, micro-sensors, chemical analysis, and biological processes, which require a large surface-to-volume ratio.