Cite
HARVARD Citation
Matsuda, T. et al. (2022). Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique. Japanese journal of applied physics. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Matsuda, T. et al. (2022). Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique. Japanese journal of applied physics. p. . [Online].