Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb0.33Al0.67N piezoelectric films/high-velocity substrates. (1st July 2022)

• Record Type: Journal Article
• Authors: Suzuki, Masashi; Kakio, Shoji
• Is Part Of: Japanese journal of applied physics. Volume 61:Number SG(2022)
• Publication Date: 2022-07-01
• Subjects: YbAlN films -- AlN films -- surface acoustic waves -- layered structure substrates; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/ac48d2
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb0.33 Al0.67 N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first-mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.