Analysis of longitudinal leaky surface acoustic waves on quartz thin plate bonded to similar-material substrate. (1st July 2022)

• Record Type: Journal Article
• Authors: Fujii, Yudai; Fujimaki, Takumi; Suzuki, Masashi; Kakio, Shoji
• Is Part Of: Japanese journal of applied physics. Volume 61:Number SG(2022)
• Publication Date: 2022-07-01
• Subjects: surface acoustic wave -- quartz -- similar-material bonded structure; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/ac49fc
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAWs) on bonded structures consisting of a quartz (Qz) thin plate and a Qz support substrate with different Euler angles were investigated theoretically. By using both an X-cut Qz thin plate and a Qz support substrate with optimal Euler angles, we obtained LLSAWs with a larger coupling factor, a smaller attenuation, and a lower temperature coefficient of frequency than those on a single Qz substrate. Furthermore, from the resonance properties simulated by the finite element method, the bonded structures were found to exhibit a large admittance ratio and a high quality factor, which could not be obtained when using a single Qz substrate; the bandwidth, however, was as small as 0.016%–0.086%.