Cite
HARVARD Citation
Hanahara, S. et al. (2022). Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu–Cu bonding. Japanese journal of applied physics. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Hanahara, S. et al. (2022). Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu–Cu bonding. Japanese journal of applied physics. p. . [Online].