Wide-range tunable Ba0.7Sr0.3TiO3 films capacitors on LiNbO3 substrates. (1st July 2022)

• Record Type: Journal Article
• Authors: Mao, Fei-Long; Lu, Zeng-Tian; Luo, Zhi-Tao; Wang, Wei-Biao; Zhang, Hui
• Is Part Of: Applied physics express. Volume 15:Number 7(2022)
• Publication Date: 2022-07-01
• Subjects: tunable capacitors -- high Q value -- wide-range tunability -- LiNbO3 substrates -- Ba0.7Sr0.3TiO3 ferroelectric films; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.35848/1882-0786/ac7632
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: Ba0.7 Sr0.3 TiO3 (BST) films on Y-cut LiNbO3 substrates are investigated to realize wide-range tunable BST capacitors. The performances of the BST films are improved by the optimal magnetron sputtering conditions. It is found that the permittivity tunability of the BST capacitor reaches 300% under an applied voltage of 5 V. Moreover, the film has a high dielectric constant 2700 under an applied voltage of 0 V, and the Q value of the BST capacitor exceeds 3000. The results demonstrate that the BST film on the LiNbO3 substrate has potential as a wide-range tunable capacitor for tunable surface acoustic wave filters.