A gas flow velocity sensor fabricated with femtosecond laser using 4 μm ultra-thin glass sheet. (1st March 2022)

• Record Type: Journal Article
• Authors: Hao, Yansheng; Tanaka, Yo; Hosokawa, Yoichiroh; Li, Ming; Yalikun, Yaxiaer
• Is Part Of: Applied physics express. Volume 15:Number 3(2022)
• Publication Date: 2022-03-01
• Subjects: flow velocity -- femtosecond laser -- ultra-thin glass fabrication; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.35848/1882-0786/ac516d
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: Here we proposed a gas flow sensor enabled by a 4 μ m ultra-thin glass sheet with high-integration capability for applications in the fields of industry and medicine/health. The sensor was fabricated with femtosecond laser processing in a time of several minutes, which can measure the gas flow velocity by detecting the displacement (0.4 μ m to 3 μ m) of the ultra-thin glass sheet in a large range of 4 m s −1 to 36 m s −1 with a sensitivity of 8.21 mV m s −1 . Furthermore, changing geometric parameters of the sensor, such as aspect ratio and thickness can adjust the sensitivity and dynamic range of the sensor.