Cite
HARVARD Citation
Qin, H. et al. (2022). Rapid-deposited high-performance submicron encapsulation film with in situ plasma oxidized Al layer inserted. Applied physics express. p. . [Online].
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Qin, H. et al. (2022). Rapid-deposited high-performance submicron encapsulation film with in situ plasma oxidized Al layer inserted. Applied physics express. p. . [Online].