Cite
HARVARD Citation
Seo, M. et al. (2022). Low-Resistivity Cobalt and Ruthenium Ultra-Thin Film Deposition Using Bipolar HiPIMS Technique. ECS journal of solid state science and technology. p. . [Online].
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Seo, M. et al. (2022). Low-Resistivity Cobalt and Ruthenium Ultra-Thin Film Deposition Using Bipolar HiPIMS Technique. ECS journal of solid state science and technology. p. . [Online].