Emission color modulation of InGaN/GaN multiple quantum wells by selective area metalorganic vapor phase epitaxy on hexagonal windows. (1st March 2022)

• Record Type: Journal Article
• Authors: Yoshida, Shin; Shojiki, Kanako; Miyake, Hideto; Uemukai, Masahiro; Tanikawa, Tomoyuki; Katayama, Ryuji
• Is Part Of: Japanese journal of applied physics. Volume 61:Number 3(2022)
• Publication Date: 2022-03-01
• Subjects: MOVPE -- InGaN -- multicolor -- MQW; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/ac55e5
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: We investigated influences of mask pattern on the emission from InGaN multiple quantum wells through the differences in plane orientation appearing on the multifaceted islands in selective area metalorganic vapor phase epitaxy. Cathodoluminescence mapping confirmed that emission colors changed depending on the crystal plane. Photoluminescence spectroscopy showed that the emission wavelength red-shifted by increasing the mask width. By combining the difference of indium incorporation efficiency depending on the crystal plane and the lateral vapor phase diffusion effect, multiple quantum wells with different emission wavelengths of up to 106 nm were grown simultaneously in the microscale region.