"Regrowth-free" fabrication of high-current-gain AlGaN/GaN heterojunction bipolar transistor with N-p-n configuration. (1st April 2022)

• Record Type: Journal Article
• Authors: Kumabe, Takeru; Watanabe, Hirotaka; Ando, Yuto; Tanaka, Atsushi; Nitta, Shugo; Honda, Yoshio; Amano, Hiroshi
• Is Part Of: Applied physics express. Volume 15:Number 4(2022)
• Publication Date: 2022-04-01
• Subjects: GaN -- AlGaN -- heterojunction bipolar transistors -- regrowth-free -- dry etching; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.35848/1882-0786/ac6197
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: An AlGaN/GaN heterojunction bipolar transistor (HBT) with N-p-n configuration was fabricated by the "regrowth-free" method, resulting in a contamination-free emitter-base AlGaN/GaN heterojunction. The low-bias-power-based low-damage inductively coupled plasma–reactive ion etching was employed in this study for emitter mesa definition instead of the conventional selective-area-regrowth technique. The method successfully minimized the etching-induced damage in the p-GaN base layer and the contamination at the emitter-base AlGaN/GaN heterojunction. Consequently, the fabricated device exhibited a high current gain of 25, the highest current density of 15.0 kA cm −2, and the lowest on-state voltage offset of 0.75 V ever reported for AlGaN/GaN HBTs.