Small ozone generator fabricated from low-temperature co-fired ceramics. Issue 1 (13th January 2021)

• Record Type: Journal Article
• Authors: Makarovič, Kostja; Belavič, Darko; Malič, Barbara; Benčan, Andreja; Kovač, Franci; Holc, Janez
• Is Part Of: Microelectronics international. Volume 38:Issue 1(2021)
• Page Start: 1
• Page End: 5
• Publication Date: 2021-01-13
• Subjects: LTCC -- Efficient -- Miniature -- Ozone generator; Microelectronics -- Periodicals; 621.381
• DOI: 10.1108/MI-07-2020-0043
• Languages: English
• ISSNs: 1356-5362

Abstract

Abstract : Purpose: The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented. Design/methodology/approach: The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized. Findings: The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV. Originality/value: A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.