Cite
HARVARD Citation
Ma, H. et al. (2022). Annealing effect on SiNx/SiO2 superlattice with ultrathin sublayer fabricated using plasma-enhanced atomic layer deposition. Ceramics international. 48 (15), pp. 22164-22171. [Online].
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Ma, H. et al. (2022). Annealing effect on SiNx/SiO2 superlattice with ultrathin sublayer fabricated using plasma-enhanced atomic layer deposition. Ceramics international. 48 (15), pp. 22164-22171. [Online].