Experimental research on closed plasma discharge and spectral diagnosis excited by high voltage and high frequency power supply. (August 2022)

• Record Type: Journal Article
• Authors: Zhang, Wenyuan; Pei, Binbin; Feng, Pei; Zhang, Lin
• Is Part Of: Vacuum. Volume 202(2022)
• Publication Date: 2022-08
• Subjects: High-voltage -- High-frequency -- Dielectric barrier discharge -- Glow discharge -- Spectral diagnosis; Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2022.111191
• Languages: English
• ISSNs: 0042-207X

Abstract

Abstract: This paper proposes a design for developing a closed plasma generator based on the low-pressure multilayer dielectric barrier discharge and glow discharge, and the discharge excited by the high-voltage and high-frequency power supply. The closed plasma generator forms the core equipment for the application of closed plasma stealth technology. The traditional plasma stealth experiments are intended for generating the plasma in the vacuum chamber. The discharge experiment has been carried out in two closed discharge chambers with dimensions 8 × 8 × 2 cm 3 and 30 × 30 × 2 cm 3, using a high-voltage high-frequency power supply. The influence of multiple excitation parameters on the gas discharge has been studied, the emission spectrum data have been measured to obtain the plasma parameter distribution in the cavity, and the factors affecting the plasma parameter distribution in the closed discharge cavity have been analyzed. The amplitude of the discharge current of the multilayer dielectric barrier discharge method has been found negligible, and the range of the plasma parameters is limited. However, by using a nanosecond pulsed glow discharge, the uniformity of plasma distribution has been significantly improved. Further, it is conducive for the adjustment of the plasma parameters corresponding to the cavity. Highlights: Low-pressure closed plasma discharge experiments are conducted. The experiment uses two types of discharges, and three types of pulse power supplies while the plasma parameters are diagnosed by emission spectroscopy. The uniformity of plasma parameter distribution can be improved by using glow discharge in a large-scale vacuum chamber. The application of the nanosecond pulse power supply can significantly improve the uniformity of plasma distribution.