Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays. (November 2015)

• Record Type: Journal Article
• Authors: Amato, Letizia; Heiskanen, Arto; Hansen, Rasmus; Gammelgaard, Lauge; Rindzevicius, Tomas; Tenje, Maria; Emnéus, Jenny; Keller, Stephan S.
• Is Part Of: Carbon. Volume 94(2015)
• Page Start: 792
• Page End: 803
• Publication Date: 2015-11
• Subjects: Carbon -- Periodicals; Carbone -- Périodiques; Koolstof; Toepassingen; Electronic journals; 546.681
• DOI: 10.1016/j.carbon.2015.06.014
• Languages: English
• ISSNs: 0008-6223

Abstract

Abstract: In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.