Mg and Ti codoping effect on the piezoelectric response of aluminum nitride thin films. (15th January 2019)

• Record Type: Journal Article
• Authors: Anggraini, Sri Ayu; Uehara, Masato; Yamada, Hiroshi; Akiyama, Morito
• Is Part Of: Scripta materialia. Number 159(2019)
• Page Start: 9
• Page End: 12
• Publication Date: 2019-01-15
• Subjects: Piezoelectric -- Sputtering -- Aluminum nitride -- MgTi -- Thin films; Materials -- Periodicals; Metallurgy -- Periodicals; Metalen; Legeringen; Materiaalkunde; Metals, metalworking and machinery industries; Metals; Electronic journals; 620.11
• DOI: 10.1016/j.scriptamat.2018.09.001
• Languages: English
• ISSNs: 1359-6462

Abstract

Abstract: Enhancement of the piezoelectric response ( d 33 ) of aluminum nitride (AlN) was attempted by incorporating Mg and/or Ti into AlN. Addition of either Mg or Ti as a single dopant was unable to effectively increase the d33 of AlN. However, the d 33 could be augmented when both Mg and Ti were codoped into AlN. The optimum d 33 (9.1 pC/N) was observed when Mg to Ti ratio was 1.3 and the (Mg + Ti) concentration was approximately 18 at.%. In this study, effect of Mg and Ti co-dopants on the d 33 of thin films was elucidated from changes in crystallinity and chemical surface state. Graphical abstract: Unlabelled Image