Wafer-sized WS2 monolayer deposition by sputtering. Issue 17 (17th March 2022)

• Record Type: Journal Article
• Authors: Villamayor, Michelle Marie S.; Husain, Sajid; Oropesa-Nuñez, Reinier; Johansson, Fredrik O. L.; Lindblad, Rebecka; Lourenço, Pedro; Bernard, Romain; Witkowski, Nadine; Prévot, Geoffroy; Sorgenfrei, Nomi L. A. N.; Giangrisostomi, Erika; Föhlisch, Alexander; Svedlindh, Peter; Lindblad, Andreas; Nyberg, Tomas
• Is Part Of: Nanoscale. Volume 14:Issue 17(2022)
• Page Start: 6331
• Page End: 6338
• Publication Date: 2022-03-17
• Subjects: Nanoscience -- Periodicals; Nanotechnology -- Periodicals; 620.505
• DOI: 10.1039/d1nr08375a
• Languages: English
• ISSNs: 2040-3364

Abstract

Abstract : Radio frequency sputtering by argon ions on a target consisting of tungsten disulphide can create a single layer of the compound on a 4′′ Si-wafer with one W atom per two S atoms when including hydrogen sulphide in the sputtering atmosphere. Abstract : We demonstrate that tungsten disulphide (WS2 ) with thicknesses ranging from monolayer (ML) to several monolayers can be grown on SiO2 /Si, Si, and Al2 O3 by pulsed direct current-sputtering. The presence of high quality monolayer and multilayered WS2 on the substrates is confirmed by Raman spectroscopy since the peak separations between the A1g -E2g and A1g -2LA vibration modes exhibit a gradual increase depending on the number of layers. X-ray diffraction confirms a textured (001) growth of WS2 films. The surface roughness measured with atomic force microscopy is between 1.5 and 3 Å for the ML films. The chemical composition WS x ( x = 2.03 ± 0.05) was determined from X-ray Photoelectron Spectroscopy. Transmission electron microscopy was performed on a multilayer film to show the 2D layered structure. A unique method for growing 2D layers directly by sputtering opens up the way for designing 2D materials and batch production of high-uniformity and high-quality (stochiometric, large grain sizes, flatness) WS2 films, which will advance their practical applications in various fields.