Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy. (19th September 2013)

• Record Type: Journal Article
• Authors: Archanjo, Bráulio S.; Siles, Pablo F.; Oliveira, Camilla K. B. Q. M.; Baptista, Daniel L.; Neves, Bernardo R. A.
• Other Names: Zhang Bin Academic Editor.
• Is Part Of: Advances in materials science and engineering. Volume 2013(2013)
• Publication Date: 2013-09-19
• Subjects: Materials science -- Periodicals; Materials science; Periodicals; 620.11
• DOI: 10.1155/2013/898565
• Languages: English
• ISSNs: 1687-8434

Abstract

Abstract : This work reports on nanoscale and microscale metal oxide gas sensors, consisting of metal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinct metal oxides, molybdenum and titanium oxides, were tested at different temperatures using CO2 and H2 as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO 2 - x .