Cite
HARVARD Citation
Yin, H. et al. (2022). Influence of Pulsed DC Sputtering Power on the Quality and Residual Stress of AlN Films on Si (100) Substrates. Crystal research and technology. 57 (5), p. n/a. [Online].
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Yin, H. et al. (2022). Influence of Pulsed DC Sputtering Power on the Quality and Residual Stress of AlN Films on Si (100) Substrates. Crystal research and technology. 57 (5), p. n/a. [Online].