A parallel 3-DOF micro-nano motion stage for vibration-assisted milling. (July 2022)

• Record Type: Journal Article
• Authors: Lv, Bingrui; Lin, Bin; Cao, Zhongchen; Li, Bin; Wang, Guilian
• Is Part Of: Mechanism and machine theory. Volume 173(2022)
• Publication Date: 2022-07
• Subjects: Compliant mechanism -- Flexure hinge -- Micro/Nano motion stage -- Piezo-actuated stage -- Vibration-assisted milling; Machine theory -- Periodicals; Machinery -- Periodicals; Machines -- Périodiques; Génie mécanique -- Périodiques; Machine theory; Machinery; Periodicals; 621.81
• DOI: 10.1016/j.mechmachtheory.2022.104854
• Languages: English
• ISSNs: 0094-114X

Abstract

Highlights: Micro-nano stage assisted milling are able to machine microstructured surfaces. A micro-nano stage with compound difference branch chain is proposed. Kinetostatic and dynamic performances of the stage are analyzed and simulated. The size of the stage is optimized by the orthogonal method. The output response characteristics of the stage are analyzed in detail. Abstract: In this paper, the design, optimization, and application of a parallel three-degree-of-freedom micro-nano motion stage for vibration-assisted milling are reported. This stage is driven by the piezoelectric effect to achieve precise position adjustment. A compound differential branch chain is designed to solve the poor stiffness of traditional branch chains and large deflection errors. Mechanical properties of the stage are theoretically, numerically, and experimentally investigated. The output displacement and natural frequency are weighed by orthogonal optimization. The open-loop tests on the prototype showed the stage performance such as hysteresis, tracking, and decoupling. Milling of typical microstructure surfaces is employed to demonstrate the effectiveness of the stage.