Cite
HARVARD Citation
Kindelmann, M. et al. (2022). Processing map to control the erosion of Y2O3 in fluorine based etching plasmas. Journal of the American Ceramic Society. 105 (5), pp. 3498-3509. [Online].
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Kindelmann, M. et al. (2022). Processing map to control the erosion of Y2O3 in fluorine based etching plasmas. Journal of the American Ceramic Society. 105 (5), pp. 3498-3509. [Online].