Topography measurement of helical grooves on a hemisphere based on stitching interference microscopy. (August 2022)

• Record Type: Journal Article
• Authors: Guo, Jingyang; Zhai, Dede; Lu, Wenwen; Chen, Shanyong
• Is Part Of: Optics & laser technology. Volume 152(2022)
• Publication Date: 2022-08
• Subjects: Interference microscopy -- Subaperture stitching -- Surface topography -- Helical groove; Optics -- Periodicals; Lasers -- Periodicals; Electronic journals; 621.366
• DOI: 10.1016/j.optlastec.2022.108133
• Languages: English
• ISSNs: 0030-3992

Abstract

Highlights: Solve the problem of microstructure measurement on large-area curved substrates. Propose a method of interferometric microscope combined with sub-aperture stitching. Designed a dedicated platform for scanning along the sub-aperture space trajectory. The topography measurement of the spiral groove on the hemisphere is completed. Extended FOV with high resolution achieved by stitching 21 sub-images. Abstract: Hemispherical bearings fabricated with helical grooves on the working surface show improved aerodynamic performance which depends to a large extent on the machining accuracy of the grooves. Topography measurement of the entire groove from macro to micro scale is thus important to evaluate the bearing performance. White light interference microscopy is widely used in topography measurement. However, subaperture stitching is necessary to extend the field of view (FOV) for large area measurement but limited to planar surfaces. This paper presents a method of interference microscopy combined with subaperture stitching. The long groove is divided into a series of subapertures with overlapping regions. Each subaperture meets the requirement of FOV and measurable slope limit of the microscope. We show that the helical curve is approximately located on a geodesic circle of the hemisphere. Accordingly a special fixture is designed with a rotary table to rotate the groove around the axis perpendicular to the geodesic circle. A four-axis scanning platform is integrated with the interference microscope. Based on the principle of minimal deviations in overlapping regions, six-degree-of-freedom motion error introduced in subaperture scanning is simultaneously corrected through an iterative stitching algorithm. It is experimentally verified by measuring a real part with helical grooves etched on a hemisphere bearing rotor. Complete high-resolution topography of the entire groove is reconstructed and the stitching map shows no overlap sliding effect, which is instructive for assessment of the machining error and further evaluation of the bearing performance.