Patterning All‐Inorganic Halide Perovskite with Adjustable Phase for High‐Resolution Color Filter and Photodetector Arrays. (3rd January 2022)

• Record Type: Journal Article
• Authors: Kim, Woosik; Kim, Su‐Kyung; Jeon, Sanghyun; Ahn, Junhyuk; Jung, Byung Ku; Lee, Sang Yeop; Shin, Chanho; Seong, Tae‐Yeon; Jeong, Sohee; Jang, Ho Seong; Ng, TSe Nga; Oh, Soong Ju
• Is Part Of: Advanced functional materials. Volume 32:Number 16(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2022-01-03
• Subjects: device arrays -- lithography -- patterning -- perovskites; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adfm.202111409
• Languages: English
• ISSNs: 1616-301X

Abstract

Abstract: Perovskite has been actively studied for optoelectronic applications, such as photodetectors and light‐emitting diodes (LEDs), because of its excellent optoelectronic properties. However, ionic bonds of the perovskite structure are vulnerable to chemicals, which makes perovskite incompatible with photolithography processes that use polar solvents. Such incompatibility with photolithography hinders perovskite patterning and device integration. Here, an all‐solution based cesium lead halide perovskite (Cs x Pb y Br z ) patterning method is introduced in which PbBr2 is patterned and then synthesized into Cs x Pb y Br z . Each step of the top‐down patterning process (e.g., developing, etching, and rinsing) is designed to be compatible with existing photolithography equipment. Structural, chemical, and optical analyses show that the PbBr2 pattern of (10 µm) 2 squares is successfully transformed into CsPbBr3 and Cs4 PbBr6 with excellent absorption and emission properties. High‐resolution photoconductor arrays and luminescent pattern arrays are fabricated with CsPbBr3 and Cs4 PbBr6 on various substrates, including flexible plastic films, to demonstrate their potential applications in image sensors or displays. The research provides a fundamental understanding of the properties and growth of perovskite and promotes technological advancement by preventing degradation during the photolithography process, enabling the integration of perovskite arrays into image sensors and displays. Abstract : An all‐solution based cesium lead halide perovskite patterning process with adjustable phases and optical properties is reported. With the patterning process, the high‐resolution photodetector array and luminescent patterns are demonstrated. The perovskite patterning process enables the integration of perovskites into image sensors and displays.