DNA‐Based Nanofabrication for Nanoelectronics. (10th February 2022)

• Record Type: Journal Article
• Authors: Hui, Liwei; Bai, Ruobing; Liu, Haitao
• Is Part Of: Advanced functional materials. Volume 32:Number 16(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2022-02-10
• Subjects: DNA nanostructure -- electronics -- metallization -- pattern -- sensing; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adfm.202112331
• Languages: English
• ISSNs: 1616-301X

Abstract

Abstract: This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction of DNA nanostructures, followed by a focused discussion of various DNA‐based fabrication approaches that are relevant to the semiconductor industry, including DNA‐based doping of semiconductor materials, DNA‐based fabrication of nanostructures of metallic, dielectric, and semiconductor materials, and DNA‐based lithographic patterning of Si, SiO2, metal, graphene, and polymer substrates. Examples of DNA‐templated fabrication of prototype nanoscale transistors and sensors are highlighted. Finally, major technical challenges facing the future applications of DNA nanotechnology in nanoelectronics and beyond are discussed. Abstract : Recent developments of DNA‐based fabrication for potential applications in nanoelectronic industry are reviewed. Surveyed topics include fabrication and assembly of DNA nanostructures and their super‐lattices, DNA‐enabled patterning and assembly of inorganic materials, and DNA‐enabled nanoscale electronic devices and sensors. The authors end the paper with a brief discussion of the current challenges and future research opportunities.