Preparation of bath temperature controlled NiFeP films for MEMS application. (1st May 2022)

• Record Type: Journal Article
• Authors: Kalaivani, A.; Bharathi, Mohanbabu; Kannan, R.; Senguttuvan, G.; Sivakumar, V.; Nithiyaprakash, D.; Guo, Donghui
• Is Part Of: Solid state communications. Volume 347(2022)
• Publication Date: 2022-05-01
• Subjects: Electrodeposition -- Current density -- Magnetic properties -- NiFeP -- EDS -- MEMS; Solid state chemistry -- Periodicals; Solid state physics -- Periodicals; Chimie de l'état solide -- Périodiques; Physique de l'état solide -- Périodiques; 530.41
• DOI: 10.1016/j.ssc.2022.114715
• Languages: English
• ISSNs: 0038-1098

Abstract

Abstract: The electrodeposition approach was used to successfully synthesise Ni-rich nano-crystalline NiFeP thin films with a constant current density of 5 mA/cm2 at electrolytic solution temperatures ranging from 30 °C to 90 °C. The energy-dispersive X-ray Analysis (EDS) and scanning electron microscopy (SEM) were used to examine the chemical composition and structural aspects of the NiFeP alloy layer. According to the structural examination, the 90 °C films were bright, uniform, and crack-free. The EDS results show a greater Ni content of 72.14 wt percent of Ni film at 90 °C with a lower P content of 5.5 wt percent. X-ray diffraction (XRD) analytics were used to establish the nano-crystalline nature and structure of the thin film. A vibrating sample magnetometer was used to examine the magnetic behaviour of a thin NiFeP sheet (VSM). Maximum magnetization saturation of 22.49×10 −3 emu was recorded for the thin films NiFeP coated at a bath temperature of 90 °C, with coercivity of 311 Gauss. Vicker's Hardness Tester was used to investigate the adhesion and microhardness of coated NiFeP sheets. NiFeP thin films are useful for the manufacture of MEMS and NEMS sensors due to their higher mechanical strength and magnetic softness. Highlights: Ni-rich nano-crystalline NiFeP thin films were successfully synthesised with various both temperature. Chemical composition and structural aspects of the NiFeP were studied by EDS and SEM. A vibrating sample magnetometer was used to examine the magnetic behaviour of a thin NiFeP sheet. The thin films prepared at 90 °C shows good properties and may be useful for the manufacture of MEMS and NEMS sensors.