Cite
HARVARD Citation
Grudinin, V. et al. (2022). Hot target magnetron sputtering enhanced by RF-ICP source: Microstructure and functional properties of CrNx coatings. Vacuum. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Grudinin, V. et al. (2022). Hot target magnetron sputtering enhanced by RF-ICP source: Microstructure and functional properties of CrNx coatings. Vacuum. p. . [Online].