Low‐Energy UV Ultrafast Laser Controlled Lift‐Off for High‐Quality Flexible GaN‐Based Device (Adv. Funct. Mater. 8/2022). (15th February 2022)

• Record Type: Journal Article
• Authors: Sun, Weigao; Ji, Lingfei; Lin, Zhenyuan; Zheng, Jincan; Wang, Zhiyong; Zhang, Litian; Yan, Tianyang
• Is Part Of: Advanced functional materials. Volume 32:Number 8(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2022-02-15
• Subjects: flexible electronics -- GaN devices -- photochemical decomposition -- plasma -- ultrafast laser lift‐off; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adfm.202270051
• Languages: English
• ISSNs: 1616-301X

Abstract

Abstract : Ultrafast Laser Lift‐Off In article number 2111920, Lingfei Ji and co‐workers present a novel one‐step laser lift‐off (LLO) for an ultra‐smooth, low‐stress patterned gallium nitride (GaN) film and GaN‐based light‐emitting diode device without affecting the electroluminescence performance of the low‐energy ultrafast laser, showing great promise in industrial fabrication of flexible GaN‐based electronics.