Interaction of impurity distribution and groove at the micro-zone of solid/liquid interface in silicon. (February 2022)

• Record Type: Journal Article
• Authors: Hu, Zhiqiang; Li, Jiayan; Tan, Yi; Jiang, Dachuan; Li, Pengting
• Is Part Of: Materials & design. Volume 214(2022)
• Publication Date: 2022-02
• Subjects: Multi-crystal silicon -- Groove -- Impurity enrichment -- Micro-zone distribution; Materials -- Periodicals; Engineering design -- Periodicals; Matériaux -- Périodiques; Conception technique -- Périodiques; Electronic journals; 620.11
• DOI: 10.1016/j.matdes.2022.110384
• Languages: English
• ISSNs: 0264-1275

Abstract

Graphical abstract: Highlights: The longitudinal distribution of impurities in silicon does not satisfy the Scheil equation and abnormal enrichment occurs. The impurity content in the groove at the junction of two grains exceeds the theoretical content by 93.5%. The interaction between impurities and grooves was studied and the evolution model of groove was proposed. The migration behavior of impurities in groove with solidification was studied and the corresponding mathematical model was proposed. Abstract: Groove, as a special structure at the front of solid–liquid (S/L) interface, takes a great influence on the distribution of impurities for silicon. In this work, the interaction between grooves and impurities was studied, and the evolution model of groove was proposed. It has been found that the crystal growth rate and the impurity content in the groove determine the evolution behavior of the groove. Correspondingly, the migration behavior of impurities in groove with solidification was studied and the mathematical model was proposed to describe the anomalous enrichment phenomenon. This work is helpful to understand the distribution behavior of impurities in micro-zone such as groove and make a theoretical foundation for the deep removal of impurities.