Generation of Surface Plasmon Resonance and Lossy Mode Resonance by thermal treatment of ITO thin-films. (June 2015)

• Record Type: Journal Article
• Authors: Del Villar, I.; Zamarreño, C.R.; Hernaez, M.; Sanchez, P.; Arregui, F.J.; Matias, I.R.
• Is Part Of: Optics & laser technology. Volume 69(2015)
• Page Start: 1
• Page End: 7
• Publication Date: 2015-06
• Subjects: Thin films -- Optical resonance -- Sensors; Optics -- Periodicals; Lasers -- Periodicals; Electronic journals; 621.366
• DOI: 10.1016/j.optlastec.2014.12.012
• Languages: English
• ISSNs: 0030-3992

Abstract

Abstract: Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields. Highlights: Study of Surface Plasmon and Lossy Mode Resonance obtained with an ITO thin-film. ITO is characterized with SEM, XRD, AFM, contact angle, conductivity, and ellipsometry. Influence of post-annealing on the position of resonances in the optical spectrum.