Atomistic understanding of scratching-induced material attrition of wurtzite single-crystal AlN using nanoscale diamond abrasive. (May 2022)

• Record Type: Journal Article
• Authors: Guo, Jian; Tan, Shilian; Xiao, Chen
• Is Part Of: Tribology international. Volume 169(2022)
• Publication Date: 2022-05
• Subjects: AlN -- Molecular dynamics simulation -- Nanowear -- Subsurface damage; Tribology -- Periodicals; 621.89
• DOI: 10.1016/j.triboint.2022.107483
• Languages: English
• ISSNs: 0301-679X

Abstract

Abstract: The scratching-induced material removal behavior and mechanism of single-crystal AlN using single diamond abrasive were studied at atomic level through molecular dynamics simulation and nanowear test. A minimum removal thickness of monolayer is achieved on Al-terminated AlN(0001) surface in simulation. Dislocations and stacking fault constitute the main subsurface lattice damage and demonstrate positive correlations with the scratching depth. Both simulated and experimental results suggest that the plasticity-dominated nanowear of AlN can be properly described with the Archard-type model that relates the wear volume linearly to the normal load in a limited load range, but cannot be maintained at high load. This work provides atomic-level insights into mechanical material attrition of AlN and contributes basic knowledge to ultraprecision surface machining. Highlights: Nano wear of AlN is elucidated at atomic level via molecular dynamics simulation and nanowear test. A minimum removal thickness with monolayer is achieved on AlN surface with diamond abrasive. Linear dependence between load and wear volume obeys Archard-type relation in a limited load range. Archard law cannot be maintained at high loads due to the transition from mild to severe wear. Occurrence of surface wear and subsurface damage corresponds to the critical penetration depth at onset of plasticity.