Two‐dimensional oxide based pressure sensors with high sensitivity. Issue 1 (11th May 2021)

• Record Type: Journal Article
• Authors: Liu, Hao; Feng, Bo; Bai, Xiaosong; Qi, Tianhang; Wei, Zhiyong; Liu, Ruichao; Yin, Keke; Gao, Jinxing; Yang, Daoyuan; Zheng, Guangchao; ten Elshof, Johan E.; Shan, Chongxin; Sun, Qi‐Jun; Yuan, Huiyu
• Is Part Of: Nano select. Volume 3:Issue 1(2022)
• Page Start: 51
• Page End: 59
• Publication Date: 2021-05-11
• Subjects: 2D materials -- pressure sensor -- sensitivity -- titanate nanosheets; Nanoscience -- Periodicals; Nanotechnology -- Periodicals; 620.5
• DOI: 10.1002/nano.202100053
• Languages: English
• ISSNs: 2688-4011

Abstract

Abstract: Nanomaterials based pressure sensors have obtained world‐wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e‐skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e‐skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two‐dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 10 6 kPa –1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure‐sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors. Abstract : A novel pressure sensor based on the ultrathin metal oxide nanosheets is demonstrated in this work. The unique properties of the metal oxide nanosheets, such as ultrathin thickness, robustness and high dielectric constant endow the pressure sensor an ultrahigh sensitivity in the order of 10 6 kPa –1, good repeatability and excellent stability. Besides, adjustable pressure sensing ranges are controlled by changing the coverage of the nanosheet film.