Basilar membrane-inspired self-powered acoustic sensor enabled by highly sensitive multi tunable frequency band. (November 2018)

• Record Type: Journal Article
• Authors: Han, Jae Hyun; Kwak, Jun-Hyuk; Joe, Daniel Juhyung; Hong, Seong Kwang; Wang, Hee Seung; Park, Jung Hwan; Hur, Shin; Lee, Keon Jae
• Is Part Of: Nano energy. Volume 53(2018)
• Page Start: 198
• Page End: 205
• Publication Date: 2018-11
• Subjects: Acoustic sensor -- Self-powered -- Multi-channel -- High sensitivity -- Tunable resonance frequency; Nanoscience -- Periodicals; Nanotechnology -- Periodicals; Nanostructured materials -- Periodicals; Power resources -- Technological innovations -- Periodicals; Nanoscience; Nanostructured materials; Nanotechnology; Power resources -- Technological innovations; Periodicals; 621.042
• DOI: 10.1016/j.nanoen.2018.08.053
• Languages: English
• ISSNs: 2211-2855

Abstract

Abstract: Herein, we report a self-powered flexible piezoelectric acoustic sensor (f-PAS) inspired by basilar membrane in human cochlear. The f-PAS covered the voice frequency spectrum via the combination of its low quality (Q) factor and multi-resonant frequency tuning, exhibiting four to eight times higher sensitivity than the conventional condenser sensor. Our piezoelectric acoustic sensor with a thin membrane design produced sufficient output voltages by the distinct resonant movement of the Pb[Zr0.52 Ti0.48 ]O3 (PZT) membrane under the minute acoustic sound stimuli. Multiple sensor channels were integrated in a single f-PAS chip with a size of 1.5 × 3 cm 2, which acquire multi-tunable piezoelectric signals without any external power. A linear response of the resonance frequency of the curved piezoelectric membrane was theoretically investigated by a finite element method (FEM) calculation. Low Q factors from corresponding channels were achieved by optimal membrane thickness and channel length. Graphical abstract: fx1 Highlights: Self-powered flexible piezoelectric acoustic sensor (f-PAS) was inspired by basilar membrane. Multi-channel f-PAS provided abundant voice information from speech without external power. A linear response in the resonance frequency of the curved PZT membrane was achieved. Coverage of the voice frequency range from 100 to 4000 Hz in f-PAS was realized.