Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition. (April 2022)

• Record Type: Journal Article
• Authors: Tokoroyama, T.; Tagami, Y.; Murashima, M.; Lee, W.-Y.; Umehara, N.; Kousaka, H.
• Is Part Of: Tribology international. Volume 168(2022)
• Publication Date: 2022-04
• Subjects: Tantalum doped DLC -- CNx -- Low friction -- Anti-oxidation; Tribology -- Periodicals; 621.89
• DOI: 10.1016/j.triboint.2022.107450
• Languages: English
• ISSNs: 0301-679X

Abstract

Abstract: Improving the hardness of amorphous carbon nitride with tantalum was realized by using ion beam assisted filtered arc deposition to obtain a low friction coefficient and low specific wear rate in ambient air. The coatings were prepared with different nitrogen flow during coating at different discharge cycles of tantalum. The wear scar and as-deposited surfaces were observed and analyzed by means of FESEM, AES, XPS, and Raman analysis. The lowest friction coefficient (~0.07) was obtained for ta-C:Ta200, which exhibited a low specific wear rate of < 1.0 × 10 −7 mm 3 /Nm. The XPS analysis revealed the existence of amorphous Ta2 O5, and the friction coefficient seemed to be positively correlated with oxygen desorption from the coatings. Highlights: Ta included ta-C:Ta showed low friction coefficient approxiately 0.07 under ambient air, the specific wear rate was less than 1.0 × 10−7 mm 3 /Nm. The coatings had tantalum oxide which was naturally grew in the coating. Oxygen desorption from the coating acts low friction surface generation.