An integrated optical waveguide micro‐cantilever system for chip‐based AFM. (16th December 2021)

• Record Type: Journal Article
• Authors: Tang, Xinxin; Fan, Guofang; Zhang, Hongru; Dai, Xingang; Hu, Yanjun; Zhang, Zhiping; Li, Yuan
• Is Part Of: Journal of microscopy. Volume 285:Part 2(2022)
• Page Start: 112
• Page End: 116
• Publication Date: 2021-12-16
• Subjects: atomic force microscopy (AFM) -- chip‐based -- integrated optical waveguide cantilever system -- nano‐tip; Microscopy -- Periodicals; 502.82
• DOI: 10.1111/jmi.13080
• Languages: English
• ISSNs: 0022-2720

Abstract

Abstract: An optical waveguide cantilever system with a tip is introduced as the displacement detection system of chip‐based atomic force microscopy (AFM) system. A chip‐based AFM on optical waveguide is demonstrated with sensitivity of up to 4.0 × 10 –2 nm –1, which is mainly constructed by a 210 nm thick optical waveguide cantilever with a nano‐tip. The nano‐tip is a height of 1.2 μm and diameter of 140 nm. This integrated on‐chip system provides a displacement range of approximately ±0.4 μm, which makes it possible for the device to be used for AFM imaging and pays the way for further performance improvement. Brief abstract: An integrated AFM based on optical waveguide technology is introduced for the miniaturisation of AFM. An optical waveguide cantilever system with a tip is designed to integrate the receiver and transmitter on a single chip. An analysis on the chip‐AFM is presented. The research demonstrates that an integrated AFM based on optical waveguide technology can work well.