Deep X-ray lithography on "sol–gel" processed noble metal mesoarchitectured films. Issue 5 (19th January 2022)

• Record Type: Journal Article
• Authors: Gayrard, Maxime; Marmiroli, Benedetta; Chancerel, Francois; Decorse, Philippe; Amenitsch, Heinz; Peron, Jennifer; Cattoni, Andrea; Faustini, Marco
• Is Part Of: Nanoscale. Volume 14:Issue 5(2022)
• Page Start: 1706
• Page End: 1712
• Publication Date: 2022-01-19
• Subjects: Nanoscience -- Periodicals; Nanotechnology -- Periodicals; 620.505
• DOI: 10.1039/d1nr07455e
• Languages: English
• ISSNs: 2040-3364

Abstract

Abstract : Noble metal coordination xerogel exhibit solubility switch when exposed to X-rays. The films can be used as recyclable negative tone resists for deep X-ray lithography that can be converted into metallic nanoarchitectured films. Abstract : Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol–gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.