Hydrogen Sensing Properties of a Tin Dioxide Thin Film Incorporated with Evaporated Palladium Nanoparticles. (3rd February 2022)

• Record Type: Journal Article
• Authors: Hsu, Chih-Chia; Niu, Jing-Shiuan; Liu, Wen-Chau
• Is Part Of: ECS journal of solid state science and technology. Volume 11:Number 2(2022)
• Publication Date: 2022-02-03
• Subjects: Pd nanoparticle (Pd NP) -- Sputtering -- Evaporation -- Hydrogen gas sensing -- Sensing response -- Selectivity -- Stability; Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2162-8777/ac4eda
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : This work demonstrates a new hydrogen gas sensor prepared by a radio-frequency (RF) sputtered tin dioxide (SnO2 ) thin film and palladium (Pd) nanoparticles (NPs). The related hydrogen gas sensing properties are comprehensively studied in this work. Materials characterizations were conducted by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), energy-dispersive X-ray spectroscopy (EDS), high-resolution scanning electron microscopy (HRSEM), and transmission electron microscopy (TEM). The employed Pd NPs greatly enlarge the surface area/volume (SA /V) ratio and enhance the catalytic activity of Pd metal. A significantly high sensing response of 1.31 × 10 5 under introduced 1000 ppm H2 /air gas with a response (recovery) time of 81 s (11 s) and a lower detecting concentration of 10 ppb H2 /air at 125 °C were acquired for the studied Pd NP/SnO2 device; as well, the studied sensor device could be operated at a lower temperature (25 °C). In addition, the studied device shows excellent selectivity and long-term stability in regard to hydrogen gas. On the basis of advantages above-mentioned and benefits of a relatively simple structure, ease of fabrication, low cost, and lower power consumption, the proposed device propitious for hydrogen gas detection.