Review of additive electrochemical micro-manufacturing technology. (February 2022)

• Record Type: Journal Article
• Authors: Li, Xinchao; Ming, Pingmei; Ao, Sansan; Wang, Wei
• Is Part Of: International journal of machine tools & manufacture. Volume 173(2022)
• Publication Date: 2022-02
• Subjects: Additive electrochemical micro-manufacturing -- Electrochemical additive manufacturing -- Electrochemical deposition -- Through-mask electroplating -- EFAB -- LECD; Machine-tools -- Periodicals; Manufacturing processes -- Periodicals; Machines-outils -- Périodiques; Fabrication -- Périodiques; Electronic journals; 621.902
• DOI: 10.1016/j.ijmachtools.2021.103848
• Languages: English
• ISSNs: 0890-6955

Abstract

Abstract: Additive electrochemical micro-manufacturing (micro-AECM) is a nontraditional fabrication method which fundamentally employs electrochemical deposition (ECD) mechanism in different forms to manufacture metal-based microstructures layer-upon-layer. Micro-AECM based on traditional mask-based ECD has long been widely adopted to manufacture large scale precision two-dimensional (2D) and quasi-three-dimensional (quasi-3D or 2.5D) metallic micro-sized geometries by inversely duplicating the photoresist though-masks patterned lithographically. Recently, micro-AECM has attracted increasing attention owing to its significant potential advantages in producing 3D complex void-free and crack-free microstructures with a favorable surface finish and now has emerged as a true additive micro-manufacturing (electrochemical additive manufacturing) technology based on ultrafine anode/electrolyte-jet-induced ECD (maskless micro-AECM). To date, several micro-AECM techniques have been developed to meet versatile applications, and some of them have already been used commercially. In this paper, the fundamental schematic of ECD closely related to micro-AECM is introduced, and several typical micro-AECM techniques are reviewed, including through-mask electroplating, instant masking (IM) plating, electrochemical fabrication (EFAB), localized electrodeposition (LECD), jet electrochemical deposition (Jet ECD), meniscus-confined electroplating (MCED), electrohydrodynamic redox printing (EHD-RP), tip-based nanofabrication (TBN), and fluidic force microscope electrodeposition (FluidFM electrodeposition). Furthermore, the challenges, development trends and perspectives of micro-AECM are discussed. Graphical abstract: Image 1 Highlights: Review of representative additive electrochemical micro-manufacturing technology. Mask-based micro-AECM techniques have higher forming accuracy and more excellent surface quality. Maskless micro-ECAM techniques possess a significant ability to form complex 3D thin micro-features. Present some outlooks on the micro-AECM technology.