High-integration and high-performance micro thermoelectric generator by femtosecond laser direct writing for self-powered IoT devices. (March 2022)

• Record Type: Journal Article
• Authors: Yu, Yuedong; Guo, Zhanpeng; Zhu, Wei; Zhou, Jie; Guo, Siming; Wang, Yaling; Deng, Yuan
• Is Part Of: Nano energy. Volume 93(2022)
• Publication Date: 2022-03
• Subjects: Micro thermoelectric generator -- Femtosecond laser direct writing -- Heat and electrical transport optimization -- Normalized output power density -- Self-powered IoT devices; Nanoscience -- Periodicals; Nanotechnology -- Periodicals; Nanostructured materials -- Periodicals; Power resources -- Technological innovations -- Periodicals; Nanoscience; Nanostructured materials; Nanotechnology; Power resources -- Technological innovations; Periodicals; 621.042
• DOI: 10.1016/j.nanoen.2021.106818
• Languages: English
• ISSNs: 2211-2855

Abstract

Abstract: Astonishing advances in IoT devices are making a revolutionary progress on smart society, but requiring for sustainable micro power sources. Micro thermoelectric generators (μTEGs) have the potential to power the IoT devices when incorporated into compact microcircuits. Nevertheless, the relatively low output of μTEGs can hardly reach the rated power and voltage for practical use at present. Herein, a femtosecond laser direct writing method is proposed for the fabrication of μTEGs with easy operation and good compatibility, and the precise adjustment of laser energy ensures a high-precision high aspect ratio pattern etch of thermoelectric films. The highly-integrated μTEG (364 pairs/cm 2 ) meets an excellent output of 494 mV and 0.514 mW cm −2 at Δ T = 33.1 K and an efficiency factor of 0.47 μW cm −2 K −2 . Eventually, it can realize an output of 3.3 V by using a power manager with the function of stabilizing and drive various electronic components, exhibiting a promising power source for self-powered IoT devices. Graphical Abstract: A femtosecond laser direct writing method is developed for high-precision patterning of thermoelectric films with easy operation and good compatibility. The μTEG meets an output of 494 mV and 0.514 mW cm −2 at a Δ T of 33.1 K, and can drive a power manager to output 3.3 V, exhibiting a promising power source for self-powered IoT devices. ga1 Highlights: Precise and simple fabrication of μTEGs by femtosecond laser direct writing. High output of 0.47 μW cm −2 K −2 from materials, integration, and module design. 3.3 V output through a power manager as an application scenario for IoT devices.